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Total properties:
42
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Patent #:
|
|
Issue Dt:
|
05/25/1993
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Application #:
|
07807067
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Filing Dt:
|
12/12/1991
|
|
Title:
|
MONITOR PLATE FOR AUTOMATIC PARTICLE DETECTION SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
03/19/2002
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Application #:
|
09119103
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Filing Dt:
|
07/20/1998
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Title:
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A METHOD FOR CREATING AND IMPROVED IMAGE ON A PHOTOMASK BY NEGATIVELY AND POSITIVELY OVERSCANNING THE BOUNDARIES OF AN IMAGE PATTERN AT INSIDE CORNER LOCATIONS
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Patent #:
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Issue Dt:
|
03/18/2003
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Application #:
|
09277497
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Filing Dt:
|
03/26/1999
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Publication #:
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Pub Dt:
|
01/30/2003
| | | | |
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Title:
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METHOD FOR FABRICATING CONTINUOUS SPACE VARIANT ATTENUATING LITHOGRAPHY MASK FOR FABRICATION OF DEVICES WITH THREE-DIMENSIONAL STRUCTURES AND MICROELECTRONICS
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Patent #:
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|
Issue Dt:
|
06/18/2002
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Application #:
|
09283087
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Filing Dt:
|
03/31/1999
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|
Title:
|
METHOD OF MANUFACTURING PHOTOMASKS BY PLASMA ETCHING WITH RESIST STRIPPED
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|
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Patent #:
|
|
Issue Dt:
|
10/29/2002
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Application #:
|
09409454
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Filing Dt:
|
09/30/1999
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|
Title:
|
DISPOSABLE HARD MASK FOR PHOTOMASK PLASMA ETCHING
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|
|
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Patent #:
|
|
Issue Dt:
|
10/29/2002
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Application #:
|
09755438
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Filing Dt:
|
01/05/2001
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Publication #:
|
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Pub Dt:
|
09/12/2002
| | | | |
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Title:
|
STEP MASK
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|
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Patent #:
|
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Issue Dt:
|
02/25/2003
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Application #:
|
09766907
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Filing Dt:
|
01/22/2001
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Publication #:
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Pub Dt:
|
07/25/2002
| | | | |
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Title:
|
FUSED SILICA PELLICLE
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|
|
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Patent #:
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|
Issue Dt:
|
03/25/2003
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Application #:
|
09773122
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Filing Dt:
|
01/31/2001
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Publication #:
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Pub Dt:
|
08/01/2002
| | | | |
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Title:
|
ELECTRICAL CRITICAL DIMENSION MEASUREMENTS ON PHOTOMASKS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/20/2003
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Application #:
|
09940947
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Filing Dt:
|
08/28/2001
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|
Publication #:
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Pub Dt:
|
03/13/2003
| | | | |
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Title:
|
METHOD FOR FABRICATING CHIRPED FIBER BRAGG GRATINGS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/20/2003
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Application #:
|
09989807
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Filing Dt:
|
11/20/2001
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|
Publication #:
|
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Pub Dt:
|
05/02/2002
| | | | |
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Title:
|
METHOD AND APPARATUS FOR MAKING PHOTOMASKS WITH IMPROVED INSIDE CORNER RESOLUTION
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/06/2004
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Application #:
|
10099622
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Filing Dt:
|
03/14/2002
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|
Publication #:
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|
Pub Dt:
|
09/18/2003
| | | | |
|
Title:
|
AUTOMATED MANUFACTURING SYSTEM AND METHOD FOR PROCESSING PHOTOMASKS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/13/2003
|
Application #:
|
10136251
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Filing Dt:
|
04/29/2002
|
|
Publication #:
|
|
Pub Dt:
|
08/29/2002
| | | | |
|
Title:
|
METHOD OF MANUFACTURING PHOTOMASKS BY PLASMA ETCHING WITH RESIST STRIPPED
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/11/2005
|
Application #:
|
10209254
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Filing Dt:
|
07/30/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
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Title:
|
RULE BASED SYSTEM AND METHOD FOR AUTOMATICALLY GENERATING PHOTOMASK ORDERS IN A SPECIFIED ORDER FORMAT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/15/2005
|
Application #:
|
10229830
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Filing Dt:
|
08/27/2002
|
|
Publication #:
|
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Pub Dt:
|
03/04/2004
| | | | |
|
Title:
|
PHOTOMASK HAVING AN INTERMEDIATE INSPECTION FILM LAYER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/15/2004
|
Application #:
|
10234790
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Filing Dt:
|
09/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
DISPOSABLE HARD MASK FOR PHOTOMASK PLASMA ETCHING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10322858
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Filing Dt:
|
12/18/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/03/2003
| | | | |
|
Title:
|
FUSED SILICA PELLICLE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2004
|
Application #:
|
10349629
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Filing Dt:
|
01/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
|
Title:
|
BINARY HALF TONE PHOTOMASKS AND MICROSCOPIC THREE-DIMENSIONAL DEVICES AND METHOD OF FABRICATING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/15/2005
|
Application #:
|
10369262
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Filing Dt:
|
02/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
|
Title:
|
METHOD FOR FABRICATING CHIRPED FIBER BRAGG GRATINGS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2004
|
Application #:
|
10370408
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Filing Dt:
|
02/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/02/2003
| | | | |
|
Title:
|
DISPOSABLE HARD MASK FOR PHASE SHIFT PHOTOMASK PLASMA ETCHING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2005
|
Application #:
|
10391001
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Filing Dt:
|
03/18/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/23/2004
| | | | |
|
Title:
|
ALTERNATING APERTURE PHASE SHIFT PHOTOMASK HAVING LIGHT ABSORPTION LAYER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/23/2006
|
Application #:
|
10658039
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Filing Dt:
|
09/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Title:
|
PHOTOMASK HAVING AN INTERNAL SUBSTANTIALLY TRANSPARENT ETCH STOP LAYER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2008
|
Application #:
|
10733723
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Filing Dt:
|
12/11/2003
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2004
| | | | |
|
Title:
|
FUSED SILICA PELLICLE IN INTIMATE CONTACT WITH THE SURFACE OF A PHOTOMASK
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2007
|
Application #:
|
10803847
|
Filing Dt:
|
03/18/2004
|
|
Publication #:
|
|
Pub Dt:
|
09/22/2005
| | | | |
|
Title:
|
EMBEDDED ATTENUATED PHASE SHIFT MASK WITH TUNABLE TRANSMISSION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10839025
|
Filing Dt:
|
05/04/2004
|
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
|
Title:
|
DISPOSABLE HARD MASK FOR PHOTOMASK PLASMA ETCHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/07/2006
|
Application #:
|
10852532
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Filing Dt:
|
05/24/2004
|
|
Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
|
Title:
|
AUTOMATED MANUFACTURING SYSTEM AND METHOD FOR PROCESSING PHOTOMASKS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/08/2008
|
Application #:
|
10866976
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Filing Dt:
|
06/14/2004
|
|
Publication #:
|
|
Pub Dt:
|
12/15/2005
| | | | |
|
Title:
|
PHOTOMASK RETICLE HAVING MULTIPLE VERSIONS OF THE SAME MASK PATTERN WITH DIFFERENT BIASES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/2010
|
Application #:
|
10877001
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Filing Dt:
|
06/25/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Title:
|
RULE BASED SYSTEM AND METHOD FOR AUTOMATICALLY GENERATING PHOTOMASK ORDERS BY CONDITIONING INFORMATION FROM A CUSTOMER'S COMPUTER SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/14/2008
|
Application #:
|
10920475
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Filing Dt:
|
08/18/2004
|
|
Publication #:
|
|
Pub Dt:
|
12/15/2005
| | | | |
|
Title:
|
METHOD OF FORMING A SEMICONDUCTOR LAYER USING A PHOTOMASK RETICLE HAVING MULTIPLE VERSIONS OF THE SAME MASK PATTERN WITH DIFFERENT BIASES
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10936071
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Filing Dt:
|
09/08/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/09/2006
| | | | |
|
Title:
|
Method of repairing a photomask having an internal etch stop layer
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2006
|
Application #:
|
10975293
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Filing Dt:
|
10/28/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/02/2005
| | | | |
|
Title:
|
BINARY HALF TONE PHOTOMASKS AND MICROSCOPIC THREE-DIMENSIONAL DEVICES AND METHOD OF FABRICATING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/2009
|
Application #:
|
10981201
|
Filing Dt:
|
11/03/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/30/2005
| | | | |
|
Title:
|
USER-FRIENDLY RULE-BASED SYSTEM AND METHOD FOR AUTOMATICALLY GENERATING PHOTOMASK ORDERS
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11006525
|
Filing Dt:
|
12/07/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/08/2006
| | | | |
|
Title:
|
System and method for automatically generating a tooling specification using a logical operations utility that can be used to generate a photomask order
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|
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Patent #:
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|
Issue Dt:
|
03/18/2008
|
Application #:
|
11024268
|
Filing Dt:
|
12/28/2004
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|
Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
|
Title:
|
ALTERNATING APERTURE PHASE SHIFT PHOTOMASK HAVING LIGHT ABSORPTION LAYER
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11139741
|
Filing Dt:
|
05/27/2005
|
|
Publication #:
|
|
Pub Dt:
|
11/30/2006
| | | | |
|
Title:
|
System and method for automatically generating and/or processing a photomask order using a script profiler
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Patent #:
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|
Issue Dt:
|
04/08/2008
|
Application #:
|
11140004
|
Filing Dt:
|
05/27/2005
|
|
Publication #:
|
|
Pub Dt:
|
12/15/2005
| | | | |
|
Title:
|
COMPREHENSIVE FRONT END METHOD AND SYSTEM FOR AUTOMATICALLY GENERATING AND PROCESSING PHOTOMASK ORDERS
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Patent #:
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Issue Dt:
|
01/20/2009
|
Application #:
|
11177459
|
Filing Dt:
|
07/08/2005
|
|
Publication #:
|
|
Pub Dt:
|
11/03/2005
| | | | |
|
Title:
|
AUTOMATED MANUFACTURING SYSTEM AND METHOD FOR PROCESSING PHOTOMASKS
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Patent #:
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|
Issue Dt:
|
01/06/2009
|
Application #:
|
11439757
|
Filing Dt:
|
05/24/2006
|
|
Publication #:
|
|
Pub Dt:
|
09/21/2006
| | | | |
|
Title:
|
BINARY HALF TONE PHOTOMASKS AND MICROSCOPIC THREE-DIMENSIONAL DEVICES AND METHOD OF FABRICATING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2010
|
Application #:
|
11788473
|
Filing Dt:
|
04/20/2007
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
|
Title:
|
PHOTOMASK WITH DETECTOR FOR OPTIMIZING AN INTEGRATED CIRCUIT PRODUCTION PROCESS AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT USING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/2010
|
Application #:
|
12105992
|
Filing Dt:
|
04/18/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
|
Title:
|
SECURE PHOTOMASK WITH BLOCKING APERTURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2011
|
Application #:
|
12106014
|
Filing Dt:
|
04/18/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
|
Title:
|
PHOTOMASK WITH DETECTOR FOR OPTIMIZING AN INTEGRATED CIRCUIT PRODUCTION PROCESS AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT USING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2012
|
Application #:
|
12106033
|
Filing Dt:
|
04/18/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
|
Title:
|
SECURITY ELEMENT FOR AN INTEGRATED CIRCUIT, INTEGRATED CIRCUIT INCLUDING THE SAME, AND METHOD FOR SECURING AN INTEGRATED CIRCUIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/14/2015
|
Application #:
|
12486564
|
Filing Dt:
|
06/17/2009
|
|
Publication #:
|
|
Pub Dt:
|
05/27/2010
| | | | |
|
Title:
|
Photomask Having A Reduced Field Size And Method Of Using The Same
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|
