Patent Assignment Details
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| Reel/Frame: | 024020/0456 | |
| Pages: | 5 |
| | Recorded: | 03/03/2010 | | |
| Attorney Dkt #: | SIP049 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/21/2015
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Application #:
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12596303
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Filing Dt:
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03/03/2010
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Publication #:
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Pub Dt:
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07/15/2010
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Title:
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DUMMY SUBSTRATE, AND START METHOD OF, RETENTION/MODIFICATION METHOD OF DEPOSITION CONDITION, AND STOP METHOD OF DEPOSITION APPARATUS USING SAME
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Assignee
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| 2500 HAGISONO |
| CHIGASAKI-SHI, JAPAN 253-8543 |
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Correspondence name and address
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GROSSMAN, TUCKER, PERREAULT & PFLEGER, P
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55 SOUTH COMMERICAL STREET
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MANCHESTER, NH 03101
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