Patent Assignment Details
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| Reel/Frame: | 024159/0664 | |
| Pages: | 3 |
| | Recorded: | 03/23/2010 | | |
| Attorney Dkt #: | 520.47162x00 |
| Conveyance: | CORRECTED ASSIGNMENT TO CORRECTLY LIST INVENTORS AND APPLICATION SERIAL NUMBER PREVIOUSLY RECORDED AT REEL 019222, FRAME 0441. |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/15/2013
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Application #:
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11673065
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Filing Dt:
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02/09/2007
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Publication #:
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Pub Dt:
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08/23/2007
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Title:
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METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATTERN FORMED ON A SEMICONDUCTOR DEVICE
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Assignee
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| 24-14, NISHISHINBASHI, MINATO-KU |
| TOKYO 105-8717, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 NORTH 17TH STREET - SUITE 1800
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ARLINGTON, VA 22209
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