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Reel/Frame:024184/0216   Pages: 5
Recorded: 04/05/2010
Attorney Dkt #:09EL-045
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/31/2015
Application #:
12753978
Filing Dt:
04/05/2010
Publication #:
Pub Dt:
10/14/2010
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
Assignors
1
Exec Dt:
04/02/2010
2
Exec Dt:
04/02/2010
3
Exec Dt:
04/02/2010
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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