Total properties:
18
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Patent #:
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Issue Dt:
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12/20/2005
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Application #:
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09789180
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Filing Dt:
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02/19/2001
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Publication #:
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Pub Dt:
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02/07/2002
| | | | |
Title:
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MULTI-BEAM MULTI-COLUMN ELECTRON BEAM INSPECTION SYSTEM
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Patent #:
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Issue Dt:
|
03/29/2005
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Application #:
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10059048
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Filing Dt:
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01/28/2002
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Publication #:
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Pub Dt:
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09/12/2002
| | | | |
Title:
|
PLATFORM POSITIONING SYSTEM
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Patent #:
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Issue Dt:
|
05/18/2004
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Application #:
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10125054
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Filing Dt:
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04/17/2002
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Publication #:
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Pub Dt:
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11/14/2002
| | | | |
Title:
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IMAGE PROCESSING SYSTEM FOR MULTI-BEAM INSPECTION
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Patent #:
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Issue Dt:
|
08/17/2004
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Application #:
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10126943
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Filing Dt:
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04/18/2002
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
Title:
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DETECTOR OPTICS FOR ELECTRON BEAM INSPECTION SYSTEM
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Patent #:
|
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Issue Dt:
|
05/11/2004
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Application #:
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10222759
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Filing Dt:
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08/15/2002
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Publication #:
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Pub Dt:
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04/10/2003
| | | | |
Title:
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MULTI-BEAM MULTI-COLUMN ELECTRON BEAM INSPECTION SYSTEM
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Patent #:
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|
Issue Dt:
|
05/10/2011
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Application #:
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10589097
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Filing Dt:
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11/09/2007
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Publication #:
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Pub Dt:
|
09/25/2008
| | | | |
Title:
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FLAT PANEL DISPLAY SUBSTRATE TESTING SYSTEM
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Patent #:
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Issue Dt:
|
01/18/2005
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Application #:
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10630619
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Filing Dt:
|
07/29/2003
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Title:
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MULTI-BEAM MULTI-COLUMN ELECTRON BEAM INSPECTION SYSTEM
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Patent #:
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|
Issue Dt:
|
10/17/2006
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Application #:
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10833949
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Filing Dt:
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04/27/2004
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Publication #:
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Pub Dt:
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01/06/2005
| | | | |
Title:
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DETECTOR OPTICS FOR CHARGED PARTICLE BEAM INSPECTION SYSTEM
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|
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Patent #:
|
|
Issue Dt:
|
09/13/2005
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Application #:
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10842849
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Filing Dt:
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05/10/2004
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Publication #:
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|
Pub Dt:
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01/06/2005
| | | | |
Title:
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MULTI-COLUMN CHARGED PARTICLE OPTICS ASSEMBLY
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Patent #:
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|
Issue Dt:
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12/09/2008
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Application #:
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10962049
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Filing Dt:
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10/07/2004
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Publication #:
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Pub Dt:
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07/06/2006
| | | | |
Title:
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OPTICS FOR GENERATION OF HIGH CURRENT DENSITY PATTERNED CHARGED PARTICLE BEAMS
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|
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Patent #:
|
|
Issue Dt:
|
06/05/2007
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Application #:
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11093000
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Filing Dt:
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03/28/2005
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Publication #:
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Pub Dt:
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03/16/2006
| | | | |
Title:
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DUAL DETECTOR OPTICS FOR SIMULTANEOUS COLLECTION OF SECONDARY AND BACKSCATTERED ELECTRONS
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|
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Patent #:
|
|
Issue Dt:
|
10/14/2008
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Application #:
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11225376
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Filing Dt:
|
09/12/2005
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Publication #:
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|
Pub Dt:
|
07/06/2006
| | | | |
Title:
|
APPARATUS AND METHOD FOR INSPECTION AND TESTING OF FLAT PANEL DISPLAY SUBSTRATES
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|
|
Patent #:
|
|
Issue Dt:
|
11/25/2008
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Application #:
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11355256
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Filing Dt:
|
02/14/2006
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Publication #:
|
|
Pub Dt:
|
08/03/2006
| | | | |
Title:
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DETECTOR OPTICS FOR MULTIPLE ELECTRON BEAM TEST SYSTEM
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|
|
Patent #:
|
|
Issue Dt:
|
08/14/2012
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Application #:
|
12050035
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Filing Dt:
|
03/17/2008
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Publication #:
|
|
Pub Dt:
|
09/18/2008
| | | | |
Title:
|
CHARGED PARTICLE OPTICS WITH AZIMUTHALLY-VARYING THIRD-ORDER ABERRATIONS FOR GENERATION OF SHAPED BEAMS
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|
|
Patent #:
|
|
Issue Dt:
|
04/19/2011
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Application #:
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12120174
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Filing Dt:
|
05/13/2008
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Publication #:
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|
Pub Dt:
|
08/20/2009
| | | | |
Title:
|
VARIABLE-RATIO DOUBLE-DEFLECTION BEAM BLANKER
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|
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Patent #:
|
|
Issue Dt:
|
02/26/2013
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Application #:
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12146331
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Filing Dt:
|
06/25/2008
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Publication #:
|
|
Pub Dt:
|
12/25/2008
| | | | |
Title:
|
CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKING AND STAGE POSITIONAL ERROR SIGNALS
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12209882
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Filing Dt:
|
09/12/2008
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Publication #:
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|
Pub Dt:
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01/08/2009
| | | | |
Title:
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ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED BEAM-DEFINING APERTURE
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|
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Patent #:
|
|
Issue Dt:
|
08/31/2010
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Application #:
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12210103
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Filing Dt:
|
09/12/2008
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Publication #:
|
|
Pub Dt:
|
03/05/2009
| | | | |
Title:
|
OPTICS FOR GENERATION OF HIGH CURRENT DENSITY PATTERNED CHARGED PARTICLE BEAMS
|
|