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Reel/Frame:024398/0078   Pages: 8
Recorded: 05/17/2010
Attorney Dkt #:135403-2148
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S ADDRESS PREVIOUSLY RECORDED ON REEL 018360 FRAME 0988. ASSIGNOR(S) HEREBY CONFIRMS THE GOESCHWITZER STRASSE 25 JENA, GERMANY D 07745.
Total properties: 1
1
Patent #:
Issue Dt:
07/13/2010
Application #:
11539342
Filing Dt:
10/06/2006
Publication #:
Pub Dt:
04/12/2007
Title:
ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN A PLASMA-BASED EUV RADIATION SOURCE
Assignors
1
Exec Dt:
09/03/2006
2
Exec Dt:
08/30/2006
3
Exec Dt:
08/30/2006
4
Exec Dt:
08/30/2006
5
Exec Dt:
08/30/2006
Assignee
1
HANS-ADOLF-KREBS-WEG 1
GOETTINGEN, GERMANY 37077
Correspondence name and address
FROMMER LAWRENCE & HAUG LLP
745 FIFTH AVENUE
NEW YORK, NY 10151

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