Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 024547/0156 | |
| Pages: | 5 |
| | Recorded: | 06/17/2010 | | |
| Attorney Dkt #: | 1990P01200US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
2
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Patent #:
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Issue Dt:
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02/08/1994
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Application #:
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07667264
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Filing Dt:
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03/11/1991
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Title:
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PHASE MASK FOR PROJECTION LITHOGRAPHY AND METHOD FOR THE MANUFACTURE THEREOF COMPRISING A SELECTIVELY ETCHABLE PHASE SHIFT LAYER DIRECTLY ON SUBSTRATE
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Patent #:
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Issue Dt:
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03/14/1995
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Application #:
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08125805
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Filing Dt:
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09/24/1993
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Title:
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PHASE MASK FOR PROJECTION LITHOGRAPHY AND METHOD FOR THE MANUFACTURE THEREOF
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Assignee
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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Correspondence name and address
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IRIS DRUCKENBROD
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AM CAMPEON 1-12
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PATENT DEPARTMENT MUC/11.2.348
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NEUBIBERG, 85579 FEDERAL REPUBLIC GERMANY
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