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Reel/Frame:025002/0837   Pages: 6
Recorded: 09/16/2010
Attorney Dkt #:010749.D01/FEP/SAVA/PJT
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/01/2012
Application #:
12883889
Filing Dt:
09/16/2010
Publication #:
Pub Dt:
01/06/2011
Title:
PLASMA, UV AND ION/NEUTRAL ASSISTED ALD OR CVD IN A BATCH TOOL
Assignors
1
Exec Dt:
06/19/2006
2
Exec Dt:
06/19/2006
3
Exec Dt:
06/27/2006
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
B. TODD PATTERSON
PATTERSON & SHERIDAN, LLP
3040 POST OAK BLVD, SUITE 1500
HOUSTON, TX 77056

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