Patent Assignment Details
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| Reel/Frame: | 025053/0551 | |
| Pages: | 4 |
| | Recorded: | 09/28/2010 | | |
| Attorney Dkt #: | 69633 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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12724721
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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09/22/2011
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Title:
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Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride
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Assignee
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| 451 BELLEVUE ROAD |
| NEWARK, DELAWARE 19713 |
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Correspondence name and address
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PATRICIA CONNELL
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451 BELLEVUE ROAD
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NEWARK, DE 19713
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