Patent Assignment Details
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| Reel/Frame: | 025085/0357 | |
| Pages: | 2 |
| | Recorded: | 10/04/2010 | | |
| Attorney Dkt #: | 026531-011700US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11849978
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Filing Dt:
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09/04/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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METHOD AND SYSTEM FOR CONTROLLING BAKE PLATE TEMPERATURE IN A SEMICONDUCTOR PROCESSING CHAMBER
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Assignee
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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Correspondence name and address
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CRAIG C. LARGENT
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111
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