Patent Assignment Details
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| Reel/Frame: | 025103/0686 | |
| Pages: | 3 |
| | Recorded: | 10/07/2010 | | |
| Attorney Dkt #: | 364734US26 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12847316
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Filing Dt:
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07/30/2010
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Publication #:
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Pub Dt:
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02/03/2011
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Title:
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SUBSTRATE POSITION ALIGNMENT MECHANISM, VACUUM PRECHAMBER AND SUBSTRATE PROCESSING SYSTEM HAVING SAME
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Assignee
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| AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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