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Reel/Frame:025162/0297   Pages: 4
Recorded: 10/19/2010
Attorney Dkt #:033082 M 627
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12668106
Filing Dt:
10/19/2010
Publication #:
Pub Dt:
01/27/2011
Title:
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Assignors
1
Exec Dt:
02/01/2010
2
Exec Dt:
02/02/2010
3
Exec Dt:
02/05/2010
4
Exec Dt:
02/09/2010
5
Exec Dt:
02/15/2010
6
Exec Dt:
03/01/2010
7
Exec Dt:
02/15/2010
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO-TO, JAPAN
Correspondence name and address
MICHAEL A. MAKUCH
1130 CONNECTICUT AVENUE, N.W.,SUITE 1130
SMITH, GAMBRELL & RUSSELL, LLP
WASHINGTON, DC 20036

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