Patent Assignment Details
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Reel/Frame: | 025314/0261 | |
| Pages: | 4 |
| | Recorded: | 11/30/2010 | | |
Conveyance: | PATENT LIEN RELEASE |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08605697
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Filing Dt:
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02/22/1996
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Title:
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INDUCTIVELY COUPLED PLASMA REACTOR AND PROCESS
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Assignee
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1 - 10, FUSO-CHO, AMAGASAKI-SHI |
GENERAL MANAGER MICRO TECHNOLOGY DIVISION |
HYOGO, 660 - 0891, JAPAN |
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Correspondence name and address
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ROBERT P. TAYLOR
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ARNOLD & PORTER, LLP
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ONE EMBARCADERO CENTER, 22ND FLOOR
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SAN FRANCISCO, CA 94111
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