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Reel/Frame:025368/0481   Pages: 6
Recorded: 11/17/2010
Attorney Dkt #:MAPSP112US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12948307
Filing Dt:
11/17/2010
Publication #:
Pub Dt:
05/19/2011
Title:
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD THEREOF AND STORAGE MEDIUM STORING PROGRAM
Assignors
1
Exec Dt:
11/05/2010
2
Exec Dt:
11/09/2010
3
Exec Dt:
11/10/2010
4
Exec Dt:
11/09/2010
Assignee
1
3-1, AKASAKA 5-CHOME,
MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
TUROCY & WATSON, LLP
57TH FLOOR, KEY TOWER
127 PUBLIC SQUARE
CLEVELAND, OH 44114

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