Patent Assignment Details
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| Reel/Frame: | 025433/0388 | |
| Pages: | 3 |
| | Recorded: | 11/30/2010 | | |
| Attorney Dkt #: | 100303 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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12992971
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Filing Dt:
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11/16/2010
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Publication #:
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Pub Dt:
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03/17/2011
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Title:
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APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE OF SEMICONDUCTOR WAFERS
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Assignees
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| 3-25-1 SHINOMIYA, |
| HIRATSUKA-SHI, KANAGAWA, JAPAN 254-8543 |
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| 2-1-1 KATAHIRA, AOBA-KU, |
| SENDAI-SHI, MIYAGI, JAPAN 980-8577 |
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Correspondence name and address
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KRATZ, QUINTOS & HANSON, LLP
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4TH FLOOR
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1420 K STREET, N.W.
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WASHINGTON, DC 20005
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