Patent Assignment Details
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| Reel/Frame: | 025438/0182 | |
| Pages: | 4 |
| | Recorded: | 12/02/2010 | | |
| Attorney Dkt #: | 87130(304691) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12736241
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Filing Dt:
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12/02/2010
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Publication #:
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Pub Dt:
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03/24/2011
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Title:
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PLASMA ETCHING METHOD
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Assignee
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| 6-2, MARUNOUCHI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1008246 |
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Correspondence name and address
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EDWARDS ANGELL PALMER & DODGE LLP
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P.O. BOX 55874
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BOSTON, MA 02205
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