Patent Assignment Details
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| Reel/Frame: | 025558/0406 | |
| Pages: | 4 |
| | Recorded: | 12/30/2010 | | |
| Attorney Dkt #: | 370772US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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12913183
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Filing Dt:
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10/27/2010
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Publication #:
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Pub Dt:
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04/28/2011
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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