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Reel/Frame:025574/0272   Pages: 3
Recorded: 01/03/2011
Attorney Dkt #:PC6017BC DIV
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/01/2011
Application #:
11970062
Filing Dt:
01/07/2008
Publication #:
Pub Dt:
06/05/2008
Title:
METHOD AND APPARATUS FOR MULTILAYER PHOTORESIST DRY DEVELOPMENT
Assignors
1
Exec Dt:
09/02/2003
2
Exec Dt:
09/02/2003
Assignee
1
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondence name and address
MELODY HILLMAN
4350 W. CHANDLER BLVD., SUITE 10
CHANDLER, AZ 85226

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