Patent Assignment Details
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| Reel/Frame: | 025593/0194 | |
| Pages: | 8 |
| | Recorded: | 12/20/2010 | | |
| Attorney Dkt #: | APPM/011364.D1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12973112
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Filing Dt:
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12/20/2010
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Publication #:
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Pub Dt:
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04/21/2011
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Title:
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TEMPERATURE MEASUREMENT AND CONTROL OF WAFER SUPPORT IN THERMAL PROCESSING CHAMBER
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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B. TODD PATTERSON
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PATTERSON & SHERIDAN, LLP
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3040 POST OAK BLVD, SUITE 1500
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HOUSTON, TX 77056
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