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Reel/Frame:025705/0365   Pages: 11
Recorded: 01/27/2011
Attorney Dkt #:FIS920100175US1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/29/2014
Application #:
13014803
Filing Dt:
01/27/2011
Publication #:
Pub Dt:
08/02/2012
Title:
METHOD AND SYSTEM TO PREDICT LITHOGRAPHY FOCUS ERROR USING SIMULATED OR MEASURED TOPOGRAPHY
Assignors
1
Exec Dt:
12/08/2010
2
Exec Dt:
12/08/2010
3
Exec Dt:
12/09/2010
4
Exec Dt:
12/09/2010
5
Exec Dt:
12/09/2010
6
Exec Dt:
12/08/2010
7
Exec Dt:
12/10/2010
Assignee
1
NEW ORCHARD ROAD
ARMONK, NEW YORK 10504
Correspondence name and address
INTERNATIONAL BUSINESS MACHINES CORPORAT
BLDG. 321-482
2070 ROUTE 52
HOPEWELL JUNCTION, NY 12533

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