Patent Assignment Details
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| Reel/Frame: | 025888/0421 | |
| Pages: | 4 |
| | Recorded: | 03/02/2011 | | |
| Attorney Dkt #: | 03595.005800. |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13037819
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Filing Dt:
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03/01/2011
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
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Assignee
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, JAPAN 215-8550 |
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Correspondence name and address
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FITZPATRICK, CELLA, HARPER & SCINTO
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1290 AVENUE OF THE AMERICAS
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17TH FL.
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NEW YORK, NY 10104
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