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Reel/Frame:025917/0948   Pages: 5
Recorded: 03/08/2011
Attorney Dkt #:MAPS-47820
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/15/2014
Application #:
13042645
Filing Dt:
03/08/2011
Publication #:
Pub Dt:
09/15/2011
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
Assignors
1
Exec Dt:
03/04/2011
2
Exec Dt:
03/07/2011
3
Exec Dt:
03/03/2011
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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