Patent Assignment Details
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| Reel/Frame: | 025963/0655 | |
| Pages: | 3 |
| | Recorded: | 03/08/2011 | | |
| Attorney Dkt #: | SON-4740 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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13064130
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Filing Dt:
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03/08/2011
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Publication #:
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Pub Dt:
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10/06/2011
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Title:
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Method of modifying chemically amplified resist pattern, modifier for chemically amplified resist pattern, and resist pattern structure
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Assignee
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| 1-7-1 KONAN |
| MINATO-KU, TOKYO, JAPAN 108-0075 |
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Correspondence name and address
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CHRISTOPHER M. TOBIN
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RADER, FISHMAN & GRAUER PLLC
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1233 20TH STREET, N W
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SUITE 501
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WASHINGTON, DC 20036
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