Patent Assignment Details
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Reel/Frame: | 025989/0259 | |
| Pages: | 3 |
| | Recorded: | 03/21/2011 | | |
Attorney Dkt #: | BPL0088US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/03/2014
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Application #:
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13060821
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Filing Dt:
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03/21/2011
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Publication #:
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Pub Dt:
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08/18/2011
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Title:
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METHOD FOR FORMING AMORPHOUS CARBON NITRIDE FILM, AMORPHOUS CARBON NITRIDE FILM, MULTILAYER RESIST FILM, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND STORAGE MEDIUM IN WHICH CONTROL PROGRAM IS STORED
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Assignee
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3-1, AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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CANTOR COLBURN LLP
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20 CHURCH STREET, 22ND FLOOR
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HARTFORD, CT 06103
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