Patent Assignment Details
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| Reel/Frame: | 026112/0926 | |
| Pages: | 4 |
| | Recorded: | 04/12/2011 | | |
| Attorney Dkt #: | APPM/11958USC1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13007963
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Filing Dt:
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01/17/2011
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Publication #:
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Pub Dt:
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05/12/2011
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Title:
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PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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B. TODD PATTERSON
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PATTERSON & SHERIDAN, LLP
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3040 POST OAK BLVD, SUITE 1500
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HOUSTON, TX 77056
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