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Reel/Frame:026178/0214   Pages: 3
Recorded: 04/25/2011
Attorney Dkt #:P3494
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/26/2013
Application #:
13028074
Filing Dt:
02/15/2011
Publication #:
Pub Dt:
09/08/2011
Title:
SYSTEMS AND METHODS FOR WAFER EDGE FEATURE DETECTION AND QUANTIFICATION
Assignors
1
Exec Dt:
04/12/2011
2
Exec Dt:
04/21/2011
Assignee
1
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondence name and address
DEBORAH WENOCUR/KLA TENCOR
4057 AMARANTA AVENUE
PALO ALTO, CA 94306

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