Patent Assignment Details
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Reel/Frame: | 026178/0214 | |
| Pages: | 3 |
| | Recorded: | 04/25/2011 | | |
Attorney Dkt #: | P3494 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/26/2013
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Application #:
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13028074
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Filing Dt:
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02/15/2011
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Publication #:
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Pub Dt:
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09/08/2011
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Title:
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SYSTEMS AND METHODS FOR WAFER EDGE FEATURE DETECTION AND QUANTIFICATION
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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DEBORAH WENOCUR/KLA TENCOR
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4057 AMARANTA AVENUE
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PALO ALTO, CA 94306
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