Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 026279/0572 | |
| Pages: | 3 |
| | Recorded: | 05/13/2011 | | |
| Attorney Dkt #: | LAM2P705B |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/02/2014
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Application #:
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13104925
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Filing Dt:
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05/10/2011
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Publication #:
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Pub Dt:
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11/15/2012
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Title:
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Semiconductor Processing System Having Multiple Decoupled Plasma Sources
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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KENNETH D. WRIGHT
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710 LAKEWAY DRIVE
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SUITE 200
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SUNNYVALE, CA 94085
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