Patent Assignment Details
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| Reel/Frame: | 026288/0601 | |
| Pages: | 3 |
| | Recorded: | 05/17/2011 | | |
| Attorney Dkt #: | 4223.64WOUS |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/13/2014
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Application #:
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12997205
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Filing Dt:
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05/17/2011
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Publication #:
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Pub Dt:
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10/06/2011
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Title:
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METHOD TO INCREASE YIELD AND REDUCE DOWN TIME IN SEMICONDUCTOR FABRICATION UNITS BY PRECONDITIONING COMPONENTS USING SUB-APERTURE REACTIVE ATOM ETCH
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Assignee
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| 300 OLD GREENWOOD ROAD |
| DECATUR, TEXAS 76234 |
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Correspondence name and address
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DOUGLAS J. CHRISTENSEN
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4800 IDS CENTER
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80 SOUTH EIGHTH STREET
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MINNEAPOLIS, MN 55402
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