Patent Assignment Details
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| Reel/Frame: | 026389/0590 | |
| Pages: | 5 |
| | Recorded: | 06/03/2011 | | |
| Attorney Dkt #: | P1881/LMRX-P166 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/24/2012
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Application #:
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12498955
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Filing Dt:
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07/07/2009
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Publication #:
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Pub Dt:
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01/14/2010
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Title:
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RF-BIASED CAPACITIVELY-COUPLED ELECTROSTATIC (RFB-CCE) PROBE ARRANGEMENT FOR CHARACTERIZING A FILM IN A PLASMA PROCESSING CHAMBER
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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IP STRATEGY GROUP, P.C.
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P.O. BOX 700640
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SAN JOSE, CA 95170
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