Patent Assignment Details
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| Reel/Frame: | 026397/0448 | |
| Pages: | 3 |
| | Recorded: | 06/06/2011 | | |
| Attorney Dkt #: | 56436.2400 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/12/2016
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Application #:
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13154271
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Filing Dt:
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06/06/2011
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Publication #:
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Pub Dt:
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12/06/2012
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Title:
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High-Throughput Semiconductor-Processing Apparatus Equipped with Multiple Dual-Chamber Modules
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Assignee
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| 23-1, 6-CHOME, NAGAYAMA |
| TAMA-SHI, TOKYO, JAPAN 206-0025 |
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Correspondence name and address
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SNELL & WILMER L.L.P. / DAMON L. BOYD
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ONE ARIZONA CENTER
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400 EAST VAN BUREN STREET
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PHOENIX, AZ 85004-2202
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