Patent Assignment Details
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| Reel/Frame: | 026450/0307 | |
| Pages: | 2 |
| | Recorded: | 05/25/2011 | | |
| Attorney Dkt #: | OKAMOTO 041AUS |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/18/2013
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Application #:
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13068995
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Filing Dt:
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05/25/2011
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Publication #:
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Pub Dt:
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09/22/2011
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Title:
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Electron beam lithography apparatus and electron beam lithography method
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Assignee
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| 32-1, ASAHI-CHO 1-CHOME, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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Correspondence name and address
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YASUO MURAMATSU
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MURAMATSU & ASSOCIATES
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114 PACIFICA
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SUITE 310
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IRVINE, CA 92618
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