Patent Assignment Details
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| Reel/Frame: | 026534/0527 | |
| Pages: | 4 |
| | Recorded: | 06/29/2011 | | |
| Attorney Dkt #: | 149780 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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13154915
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Filing Dt:
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06/07/2011
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Publication #:
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Pub Dt:
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12/08/2011
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Title:
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CONTROL SYSTEM OF SUBSTRATE PROCESSING APPARATUS, COLLECTING UNIT, SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF THE SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO 101-8980, JAPAN |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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