Patent Assignment Details
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| Reel/Frame: | 026540/0391 | |
| Pages: | 5 |
| | Recorded: | 07/05/2011 | | |
| Attorney Dkt #: | 379120US2X |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/19/2015
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Application #:
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13083157
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Filing Dt:
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04/08/2011
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Publication #:
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Pub Dt:
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10/20/2011
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Title:
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INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSITIONAL ERRORS OF A PATTERN
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Assignees
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| 2068-3, OOKA |
| NUMAZU-SHI, SHIZUOKA, JAPAN 410-8510 |
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8001 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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