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Total properties:
13
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Patent #:
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Issue Dt:
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09/15/1998
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Application #:
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08820914
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Filing Dt:
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03/19/1997
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Title:
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APPARATUS FOR SENSING RF CURRENT DELIVERED TO A PLASMA WITH TWO INDUCTIVE LOOPS
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09094883
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Filing Dt:
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06/15/1998
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Title:
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APPARATUS FOR SENSING RF CURRENT DELIVERED TO A PLASMA WITH TWO INDUCTIVE LOOPS
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09650256
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Filing Dt:
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08/29/2000
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Title:
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RF CURRENT SENSOR
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09650272
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Filing Dt:
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08/29/2000
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Title:
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METHOD OF PROCESSING A HIGH FREQUENCY SIGNAL CONTAINING MULTIPLE FUNDAMENTAL FREQUENCIES
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09650277
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Filing Dt:
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08/29/2000
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Title:
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METHOD FOR FAULT IDENTIFICATION IN A PLASMA PROCESS
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10021324
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Filing Dt:
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12/06/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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ENDPOINT DETECTION IN THE ETCHING OF DIELECTRIC LAYERS
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10076803
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Filing Dt:
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02/14/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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FAULT CLASSIFICATION IN A PLASMA PROCESS CHAMBER
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10133081
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Filing Dt:
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04/26/2002
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Publication #:
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Pub Dt:
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08/28/2003
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Title:
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PLASMA CHAMBER CLEANING
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10133931
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Filing Dt:
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04/26/2002
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Title:
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PLASMA CHAMBER CONDITIONING
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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10295350
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Filing Dt:
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11/15/2002
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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METHOD FOR FAULT DETECTION IN A PLASMA PROCESS
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10791132
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Filing Dt:
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03/02/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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METHOD FOR PROCESS CONTROL OF SEMICONDUCTOR MANUFACTIRING EQUIPMENT
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10837396
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Filing Dt:
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04/30/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Title:
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RADIO FREQUENCY LANGMUIR PROBE
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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11157644
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Filing Dt:
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06/21/2005
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Publication #:
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Pub Dt:
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03/02/2006
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Title:
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METHOD FOR TRANSFERRING PROCESS CONTROL MODELS BETWEEN PLASMA PROCESSING CHAMBERS
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