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Reel/Frame:026778/0378   Pages: 4
Recorded: 08/19/2011
Attorney Dkt #:081468-0395009
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/30/2014
Application #:
13149251
Filing Dt:
05/31/2011
Publication #:
Pub Dt:
12/08/2011
Title:
FLUID SUPPLY SYSTEM, A LITHOGRAPHIC APPARATUS, A METHOD OF VARYING FLUID FLOW RATE AND A DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
06/06/2011
2
Exec Dt:
06/07/2011
3
Exec Dt:
07/26/2011
Assignee
1
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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