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Reel/Frame:026886/0171   Pages: 12
Recorded: 09/12/2011
Attorney Dkt #:069918.00005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 22
1
Patent #:
5660640
Issue Dt:
08/26/1997
Application #:
08491154
Filing Dt:
06/16/1995
Title:
METHOD OF REMOVING SPUTTER DEPOSITION FROM COMPONENTS OF VACUUM DEPOSITION EQUIPMENT
2
Patent #:
5651797
Issue Dt:
07/29/1997
Application #:
08511975
Filing Dt:
08/07/1995
Title:
APPARATUS AND METHOD FOR THE IMMERSION CLEANING AND TRANSPORT OF SEMICONDUCTOR COMPONENTS
3
Patent #:
6810887
Issue Dt:
11/02/2004
Application #:
09927263
Filing Dt:
08/10/2001
Publication #:
US20040045574
Pub Dt:
03/11/2004
Title:
METHOD FOR CLEANING SEMICONDUCTOR FABRICATION EQUIPMENT PARTS
4
Patent #:
6902628
Issue Dt:
06/07/2005
Application #:
10304535
Filing Dt:
11/25/2002
Publication #:
US20040099285
Pub Dt:
05/27/2004
Title:
METHOD OF CLEANING A COATED PROCESS CHAMBER COMPONENT
5
Patent #:
7045072
Issue Dt:
05/16/2006
Application #:
10627185
Filing Dt:
07/24/2003
Publication #:
US20050016958
Pub Dt:
01/27/2005
Title:
CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS
6
Patent #:
7091132
Issue Dt:
08/15/2006
Application #:
10627416
Filing Dt:
07/24/2003
Publication #:
US20050016959
Pub Dt:
01/27/2005
Title:
ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS
7
Patent #:
7097713
Issue Dt:
08/29/2006
Application #:
10643409
Filing Dt:
08/19/2003
Publication #:
US20050039774
Pub Dt:
02/24/2005
Title:
METHOD FOR REMOVING A COMPOSITE COATING CONTAINING TANTALUM DEPOSITION AND ARC SPRAYED ALUMINUM FROM CERAMIC SUBSTRATES
8
Patent #:
7754609
Issue Dt:
07/13/2010
Application #:
10696394
Filing Dt:
10/28/2003
Title:
CLEANING PROCESSES FOR SILICON CARBIDE MATERIALS
9
Patent #:
6902627
Issue Dt:
06/07/2005
Application #:
10742604
Filing Dt:
12/19/2003
Publication #:
US20040163669
Pub Dt:
08/26/2004
Title:
CLEANING CHAMBER SURFACES TO RECOVER METAL-CONTAINING COMPOUNDS
10
Patent #:
NONE
Issue Dt:
Application #:
10807716
Filing Dt:
03/24/2004
Publication #:
US20050215059
Pub Dt:
09/29/2005
Title:
Process for producing semi-conductor coated substrate
11
Patent #:
7618769
Issue Dt:
11/17/2009
Application #:
10863151
Filing Dt:
06/07/2004
Publication #:
US20050271984
Pub Dt:
12/08/2005
Title:
TEXTURED CHAMBER SURFACE
12
Patent #:
7964085
Issue Dt:
06/21/2011
Application #:
10870716
Filing Dt:
06/17/2004
Title:
ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS
13
Patent #:
7452475
Issue Dt:
11/18/2008
Application #:
11061013
Filing Dt:
02/17/2005
Publication #:
US20050167393
Pub Dt:
08/04/2005
Title:
CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS
14
Patent #:
7554052
Issue Dt:
06/30/2009
Application #:
11192600
Filing Dt:
07/29/2005
Publication #:
US20070026159
Pub Dt:
02/01/2007
Title:
METHOD AND APPARATUS FOR THE APPLICATION OF TWIN WIRE ARC SPRAY COATINGS
15
Patent #:
NONE
Issue Dt:
Application #:
11272844
Filing Dt:
11/14/2005
Publication #:
US20070111642
Pub Dt:
05/17/2007
Title:
Apparatus and methods for slurry cleaning of etch chambers
16
Patent #:
NONE
Issue Dt:
Application #:
11400125
Filing Dt:
04/07/2006
Publication #:
US20060180180
Pub Dt:
08/17/2006
Title:
System and method for cleaning semiconductor fabrication equipment parts
17
Patent #:
7377991
Issue Dt:
05/27/2008
Application #:
11477191
Filing Dt:
06/27/2006
Publication #:
US20060243390
Pub Dt:
11/02/2006
Title:
ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS
18
Patent #:
7789969
Issue Dt:
09/07/2010
Application #:
11931272
Filing Dt:
10/31/2007
Publication #:
US20080099054
Pub Dt:
05/01/2008
Title:
METHODS AND APPARATUS FOR CLEANING CHAMBER COMPONENTS
19
Patent #:
NONE
Issue Dt:
Application #:
12146676
Filing Dt:
06/26/2008
Publication #:
US20090000641
Pub Dt:
01/01/2009
Title:
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH
20
Patent #:
8492674
Issue Dt:
07/23/2013
Application #:
12189141
Filing Dt:
08/09/2008
Publication #:
US20090043416
Pub Dt:
02/12/2009
Title:
METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS
21
Patent #:
8097089
Issue Dt:
01/17/2012
Application #:
12339037
Filing Dt:
12/18/2008
Publication #:
US20090197004
Pub Dt:
08/06/2009
Title:
METHODS FOR CLEANING PROCESS KITS AND CHAMBERS, AND FOR RUTHENIUM RECOVERY
22
Patent #:
8372211
Issue Dt:
02/12/2013
Application #:
12881503
Filing Dt:
09/14/2010
Publication #:
US20110061685
Pub Dt:
03/17/2011
Title:
METHOD AND APPARATUS FOR SHOWERHEAD CLEANING
Assignor
1
APPLIED MATERIALS, INC.
Exec Dt:
05/12/2011
Assignee
1
QUANTUM GLOBAL TECHNOLOGIES LLC
123 N. MAIN STREET
DUBLIN, PENNSYLVANIA 18917
Correspondence name and address
FOX ROTHSCHILD LLP
IP DOCKET, P.O. BOX 5231
PRINCETON, NJ 08543-5231

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