Patent Assignment Details
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| Reel/Frame: | 026889/0179 | |
| Pages: | 2 |
| | Recorded: | 09/12/2011 | | |
| Attorney Dkt #: | 029929.00049 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13130997
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Filing Dt:
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09/12/2011
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Publication #:
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Pub Dt:
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12/29/2011
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Title:
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METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS FOR FORMING THE SAME
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Assignee
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| 2500, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8543 |
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Correspondence name and address
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ARENT FOX LLP
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1050 CONNECTICUT AVE, NW
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WASHINGTON, DC 20036
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