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Patent #:
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Issue Dt:
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08/03/1993
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Application #:
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07761171
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Filing Dt:
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08/30/1991
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Title:
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FEEDBACK CONTROL FOR SCANNING TUNNEL MICROSCOPES
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07793245
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Filing Dt:
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11/12/1991
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Title:
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SCANNER FOR SCANNING PROBE MICROSCOPES HAVING REDUCED Z-AXIS NON-LINEARITY
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Patent #:
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Issue Dt:
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07/06/1993
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Application #:
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07831876
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Filing Dt:
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02/06/1992
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Title:
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ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07835577
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Filing Dt:
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02/14/1992
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Title:
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METHOD OF ADJUSTING THE SIZE OF THE AREA SCANNED BY A SCANNING PROBE
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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07850669
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Filing Dt:
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03/13/1992
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Title:
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SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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09/05/1995
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Application #:
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07850677
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Filing Dt:
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03/13/1992
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Title:
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OPTICAL SYSTEM FOR SCANNING MICROSCOPE
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Patent #:
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Issue Dt:
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10/19/1993
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Application #:
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07883043
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Filing Dt:
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05/07/1992
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Title:
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ATOMIC FORCE MICROSCOPE FOR SMALL SAMPLES HAVING DUAL-MODE OPERATING CAPABILITY
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Patent #:
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Issue Dt:
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05/09/1995
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Application #:
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07926175
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Filing Dt:
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08/07/1992
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Title:
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A TAPPING ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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05/24/1994
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Application #:
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07970875
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Filing Dt:
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11/03/1992
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Title:
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STIFFNESS ENHANCER FOR MOVABLE STAGE ASSEMBLY
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Patent #:
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Issue Dt:
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03/28/1995
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Application #:
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07974603
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Filing Dt:
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11/12/1992
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Title:
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METHODS OF OPERATING ATOMIC FORCE MICROSCOPES TO MEASURE FRICTION
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Patent #:
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Issue Dt:
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11/30/1993
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Application #:
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08009076
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Filing Dt:
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01/26/1993
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Title:
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JUMPING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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01/09/1996
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Application #:
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08055236
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Filing Dt:
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04/28/1993
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Title:
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RESONANCE CONTACT SCANNING FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08073201
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Filing Dt:
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06/03/1993
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Title:
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PIEZPRESISTIVE CANTILEVER FOR SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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07/19/1994
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Application #:
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08085053
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Filing Dt:
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07/02/1993
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Title:
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ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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04/18/1995
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Application #:
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08086592
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Filing Dt:
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07/02/1993
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Title:
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SYNCHRONOUS SAMPLING SCANNING FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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11/07/1995
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Application #:
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08107017
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Filing Dt:
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08/17/1993
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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08/15/1995
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Application #:
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08127661
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Filing Dt:
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09/27/1993
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Title:
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THERMAL SENSING SCANNING PROBE MICROSCOPE AND METHOD FOR MEASUREMENT OF THERMAL PARAMETERS OF A SPECIMEN
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Patent #:
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Issue Dt:
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05/16/1995
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Application #:
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08147571
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Filing Dt:
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11/05/1993
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Title:
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JUMPING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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10/03/1995
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Application #:
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08273740
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Filing Dt:
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07/12/1994
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Title:
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SCANNING PROBE MICROSCOPE APPARATUS FOR USE IN A SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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11/28/1995
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Application #:
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08357133
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Filing Dt:
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12/15/1994
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Title:
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SCANNING APPARATUS LINEARIZATION AND CALIBRATION SYSTEM
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Patent #:
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Issue Dt:
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04/16/1996
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Application #:
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08360588
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Filing Dt:
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12/21/1994
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Title:
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SYNCHRONOUS SAMPLING SCANNING FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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05/21/1996
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Application #:
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08381159
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Filing Dt:
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01/31/1995
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Title:
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TAPPING ATOMIC FORCE MICROSCOPE WITH PHASE OR FREQUENCY DETECTION
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Patent #:
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Issue Dt:
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10/01/1996
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Application #:
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08416100
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Filing Dt:
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04/04/1995
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08428358
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Filing Dt:
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04/21/1995
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Title:
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SCANNING PROBE MICROSCOPE HAVING A SINGLE VIEWING DEVICE FOR ON-AXIS AND OBLIQUE OPTICAL VIEWS
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Patent #:
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Issue Dt:
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04/23/1996
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Application #:
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08478479
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Filing Dt:
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06/07/1995
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Title:
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SCANNING PROBE MICROSCOPE APPARATUS FOR USE IN A SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08502368
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Filing Dt:
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07/14/1995
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Title:
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METHODS OF OPERATING ATOMIC FORCE MICROSCOPES TO MEASURE FRICTION
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Patent #:
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Issue Dt:
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01/06/1998
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Application #:
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08521584
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Filing Dt:
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08/30/1995
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Title:
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SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT
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Patent #:
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Issue Dt:
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06/24/1997
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Application #:
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08560827
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Filing Dt:
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11/20/1995
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Title:
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SCANNING APPARATUS LINEARIZATION AND CALIBRATION SYSTEM
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Patent #:
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Issue Dt:
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10/28/1997
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Application #:
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08631555
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Filing Dt:
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04/12/1996
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Title:
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RESONANCE CONTACT SCANNING FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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02/03/1998
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Application #:
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08679332
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Filing Dt:
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07/11/1996
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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09/22/1998
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Application #:
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08694690
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Filing Dt:
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08/09/1996
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Title:
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SINGLE AXIS VIBRATION REDUCING SYSTEM
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08794379
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Filing Dt:
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02/04/1997
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Title:
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METHOD AND APPARATUS FOR MEASURING MECHANICAL PROPERTIES ON A SMALL SCALE
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08808351
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Filing Dt:
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02/28/1997
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Title:
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SCANNING PROBE MICROSCOPE PROVIDING UNOBSTRUCTED TOP DOWN AND BOTTOM UP VIEWS
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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08828771
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Filing Dt:
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04/01/1997
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Title:
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SCANNING PROBE MICROSCOPE WITH MULTIMODE HEAD
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Patent #:
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Issue Dt:
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08/17/1999
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Application #:
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08831153
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Filing Dt:
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04/01/1997
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Title:
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SCANNING PROBE MICROSCOPE WITH SCAN CORRECTION
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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08898469
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Filing Dt:
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07/22/1997
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Title:
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METHOD AND APPARATUS FOR MEASURING ENERGY DISSIPATION BY A PROBE DURING OPERATION OF AN ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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01/19/1999
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Application #:
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08916571
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Filing Dt:
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08/22/1997
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Title:
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ATOMIC FORCE MICROSCOPE FOR ATTACHMENT TO OPTICAL MICROSCOPE
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08916830
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Filing Dt:
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08/22/1997
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Title:
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ATOMIC FORCE MICROSCOPE WITH INTEGRATED OPTICS FOR ATTACHMENT TO OPTICAL MICROSCOPE
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08937494
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Filing Dt:
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09/25/1997
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Title:
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METHOD AND APPARATUS FOR OBTAINING IMPROVED VERTICAL METROLOGY MEASUREMENTS
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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08984058
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Filing Dt:
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12/03/1997
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Title:
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METHOD FOR IMPROVING THE OPERATION OF OSCILLATING MODE ATOMIC FORCE MICROSCOPES
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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09119808
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Filing Dt:
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07/21/1998
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Title:
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VOICE COIL SCANNER FOR USE IN SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09129066
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Filing Dt:
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08/04/1998
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Title:
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KINEMATICALLY MOUNTED PROBE HOLDER FOR SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09186742
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Filing Dt:
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11/05/1998
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Title:
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AFM WITH REFERENCED OR DIFFERENTIAL HEIGHT MEASUREMENT
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09188497
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Filing Dt:
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11/09/1998
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Title:
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METHOD AND APPARATUS FOR THE QUANTITATIVE AND OBJECTIVE CORRELATION OF DATA FROM A LOCAL SENSITIVE FORCE DETECTOR
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09208733
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Filing Dt:
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12/09/1998
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Title:
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SCANNING PROBE MICROSCOPE WITH SCAN CORRECTION
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09240713
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Filing Dt:
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01/29/1999
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Title:
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METHOD AND APPARATUS FOR CLEANING A TIP OF A PROBE OF A PROBE-BASED MEASURING INSTRUMENT
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09255477
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Filing Dt:
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02/23/1999
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Title:
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VERTICAL PROBE CARD FOR ATTACHMENT WITHIN A CENTRAL CORRIDOR OF A MAGNETIC FIELD GENERATOR
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09280160
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Filing Dt:
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03/29/1999
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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02/13/2001
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Application #:
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09354448
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Filing Dt:
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07/15/1999
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Title:
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METHOD AND SYSTEM FOR INCREASING THE ACCURACY OF A PROBE-BASED INSTRUMENT MEASURING A HEATED SAMPLE
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06/12/2001
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Application #:
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09398698
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09/20/1999
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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Patent #:
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Issue Dt:
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11/27/2001
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09399388
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09/20/1999
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Title:
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HIGH BANDWIDTH RECOILESS MICROACTUATOR
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Issue Dt:
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03/11/2003
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09476163
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12/30/1999
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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07/24/2001
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09561448
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04/28/2000
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Title:
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Scanning probe microscope with scan correction
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Patent #:
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08/28/2001
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09698919
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10/27/2000
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Title:
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AFM with referenced or differential height measurement
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05/21/2002
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09731308
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12/06/2000
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Pub Dt:
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04/19/2001
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Title:
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METHOD AND SYSTEM FOR INCREASING THE ACCURACY OF A PROBE-BASED INSTRUMENT MEASURING A HEATED SAMPLE
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Patent #:
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09/11/2001
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09751728
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12/29/2000
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Method and apparatus for high resolution profiling in semiconductor structures
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01/04/2005
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09761792
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01/17/2001
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07/18/2002
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Title:
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METHOD AND APPARATUS FOR REDUCING THE PARACHUTING OF A PROBE
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09/02/2003
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09803268
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03/09/2001
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09/12/2002
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APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN METROLOGY APPARATUS
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06/25/2002
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09824452
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04/02/2001
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08/16/2001
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FLEXURE ASSEMBLY FOR A SCANNER
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03/11/2003
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09855960
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05/15/2001
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09/12/2002
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APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN A METROLOGY APPARATUS
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11/09/2004
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09871287
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05/31/2001
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12/05/2002
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METHOD OF CHARACTERIZING A SEMICONDUCTOR SURFACE
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03/08/2005
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09904634
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07/13/2001
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09/12/2002
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METHOD AND APPARATUS FOR MANIPULATING A SAMPLE
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01/06/2004
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09904913
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07/13/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Title:
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DYNAMIC ACTIVATION FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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07/08/2003
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09906985
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07/16/2001
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Publication #:
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12/27/2001
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Title:
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OPTICAL SYSTEM FOR SCANNING MICROSCOPE
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Patent #:
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01/13/2004
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Application #:
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10006085
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12/06/2001
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Publication #:
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06/19/2003
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FORCE SCANNING PROBE MICROSCOPE
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Issue Dt:
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03/21/2006
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10006090
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12/06/2001
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MANUAL CONTROL WITH FORCE-FEEDBACK FOR PROBE MICROSCOPY-BASED FORCE SPECTROSCOPY
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09/13/2005
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10045438
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11/07/2001
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APPARATUS AND METHOD TO COMPENSATE FOR STRESS IN A MICROCANTILEVER
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01/02/2007
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10052921
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11/09/2001
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Title:
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SCANNING ELECTROCHEMICAL POTENTIAL MICROSCOPE
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04/29/2003
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10101987
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Filing Dt:
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03/19/2002
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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10/26/2004
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10139949
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Filing Dt:
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05/06/2002
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Title:
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IMAGE RECONSTRUCTION METHOD
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04/13/2004
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10164460
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06/06/2002
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10/24/2002
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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09/20/2005
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10189108
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07/02/2002
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Title:
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TORSIONAL RESONANCE MODE PROBE-BASED INSTRUMENT AND METHOD
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07/18/2006
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10285013
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10/31/2002
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05/06/2004
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Title:
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ENVIRONMENTAL SCANNING PROBE MICROSCOPE
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11/02/2004
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10310546
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12/05/2002
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05/22/2003
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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05/03/2005
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10345513
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01/16/2003
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07/22/2004
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Title:
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METHOD OF FABRICATING A SURFACE PROBING DEVICE AND PROBING DEVICE PRODUCED THEREBY
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07/05/2005
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10417506
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04/17/2003
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10/21/2004
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11/11/2008
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10464379
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06/18/2003
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08/16/2005
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10624246
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07/22/2003
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07/15/2004
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05/02/2006
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10752235
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01/06/2004
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12/23/2004
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DYNAMIC ACTIVATION FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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05/16/2006
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10756579
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01/13/2004
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04/21/2005
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01/30/2007
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10937597
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09/09/2004
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02/10/2005
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METHOD AND APPARATUS OF DRIVING TORSIONAL RESONANCE MODE OF A PROBE-BASED INSTRUMENT
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11/28/2006
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10944333
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09/17/2004
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02/24/2005
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IMAGE RECONSTRUCTION METHOD
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03/28/2006
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10966619
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10/15/2004
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03/31/2005
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD FOR USE THEREOF
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05/09/2006
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11075019
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03/08/2005
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07/07/2005
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10/06/2009
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11106366
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04/14/2005
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01/05/2006
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04/06/2010
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05/03/2005
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09/29/2005
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02/23/2010
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05/19/2005
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10/12/2006
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01/02/2007
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05/21/2005
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09/29/2005
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04/07/2009
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08/12/2005
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02/15/2007
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09/02/2008
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09/16/2005
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03/22/2007
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09/30/2008
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09/30/2005
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04/05/2007
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10/27/2009
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04/26/2006
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11/01/2007
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02/26/2008
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06/17/2008
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12/21/2006
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01/20/2009
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03/21/2006
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09/27/2007
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04/17/2007
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08/31/2006
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12/15/2009
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02/15/2011
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