Patent Assignment Details
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Reel/Frame: | 027162/0261 | |
| Pages: | 3 |
| | Recorded: | 11/02/2011 | | |
Attorney Dkt #: | 211843-00032 DIV. |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/06/2011
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Application #:
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12268524
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Filing Dt:
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11/11/2008
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Publication #:
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Pub Dt:
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04/09/2009
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Title:
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ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
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Assignee
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34 SULLIVAN ROAD |
NORTH BILLERICA, ILLINOIS 01862-2000 |
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Correspondence name and address
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JOHN S. PANIAGUAS
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2900 K STREET, NW
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SUITE 200
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WASHINGTON, DC 20007-5118
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