Patent Assignment Details
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| Reel/Frame: | 027168/0780 | |
| Pages: | 8 |
| | Recorded: | 11/03/2011 | | |
| Attorney Dkt #: | 15115USAETCHSILICONMDD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/19/2020
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Application #:
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13174090
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Filing Dt:
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06/30/2011
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Publication #:
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Pub Dt:
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04/19/2012
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Title:
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METHOD AND APPARATUS FOR REDUCING PARTICLE DEFECTS IN PLASMA ETCH CHAMBERS
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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JAMES M. HOWARD
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1279 OAKMEAD PARKWAY
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SUNNYVALE, CA 94085-4040
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