Patent Assignment Details
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Reel/Frame: | 027189/0554 | |
| Pages: | 3 |
| | Recorded: | 11/08/2011 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/01/2013
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Application #:
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13291171
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Filing Dt:
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11/08/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Title:
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METHOD AND ARRANGEMENT FOR THE STABILIZATION OF THE SOURCE LOCATION OF THE GENERATION OF EXTREME ULTRAVIOLET (EUV) RADIATION BASED ON A DISCHARGE PLASMA
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Assignee
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15 STEINBACHSTRASSE |
AACHEN, GERMANY 52074 |
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Correspondence name and address
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MARIA M. ELISEEVA
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HOUSTON ELISEEVA LLP
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420 BEDFORD ST., SUITE 155
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LEXINGTON, MA 02420
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