Patent Assignment Details
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| Reel/Frame: | 027289/0553 | |
| Pages: | 2 |
| | Recorded: | 11/29/2011 | | |
| Attorney Dkt #: | REN-8081 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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13305858
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Filing Dt:
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11/29/2011
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Publication #:
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Pub Dt:
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06/21/2012
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, EXPOSURE METHOD, AND EXPOSURE APPARATUS
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Assignee
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| 1753, SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, |
| KANAGAWA, JAPAN |
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Correspondence name and address
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SHRINATH MALUR, MATTINGLY & MALUR, PC
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1800 DIAGONAL RD.
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SUITE 370
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ALEXANDRIA, VA 22314
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