Patent Assignment Details
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| Reel/Frame: | 027316/0065 | |
| Pages: | 7 |
| | Recorded: | 12/02/2011 | | |
| Attorney Dkt #: | HITACHI12-20910122US01 |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE TITLE TO SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PREVIOUSLY RECORDED ON REEL 027177 FRAME 0980. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/15/2016
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Application #:
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13289450
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Filing Dt:
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11/04/2011
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Publication #:
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Pub Dt:
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05/17/2012
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
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Assignee
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 SOUTH 17TH STREET
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UNITED PLAZA
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PHILADELPHIA, PA 19103
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