Patent Assignment Details
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| Reel/Frame: | 027441/0620 | |
| Pages: | 3 |
| | Recorded: | 12/23/2011 | | |
| Attorney Dkt #: | RLSA-012 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/04/2014
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Application #:
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13336388
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Filing Dt:
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12/23/2011
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Publication #:
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Pub Dt:
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06/27/2013
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Title:
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HIGHLY SELECTIVE SPACER ETCH PROCESS WITH REDUCED SIDEWALL SPACER SLIMMING
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Assignee
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2545 W. FRYE RD.
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SUITE 1
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CHANDLER, AZ 85224
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