Patent Assignment Details
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| Reel/Frame: | 027457/0604 | |
| Pages: | 3 |
| | Recorded: | 12/29/2011 | | |
| Attorney Dkt #: | LUNGP0108US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/24/2013
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Application #:
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13339400
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Filing Dt:
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12/29/2011
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Publication #:
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Pub Dt:
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04/04/2013
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Title:
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TREATMENT METHOD FOR REDUCING PARTICLES IN DUAL DAMASCENE SILICON NITRIDE PROCESS
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Assignee
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| NO. 497 GAO SI ROAD |
| ZHANGJIANG HI-TECH PARK, PUDONG |
| SHANGHAI, CHINA 201203 |
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Correspondence name and address
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NEIL A. DUCHEZ
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1621 EUCLID AVENUE
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19TH FLOOR
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CLEVELAND, OH 44125
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