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Patent #:
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Issue Dt:
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09/04/1990
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Application #:
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07285435
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Filing Dt:
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03/07/1989
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Title:
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METHOD OF CHEMICAL-MECHANICAL POLISHING AN ELECTRONIC COMPONENT SUBSTRATE AND POLISHING SLURRY THEREFOR
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Patent #:
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Issue Dt:
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06/18/1996
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Application #:
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08319213
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Filing Dt:
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10/06/1994
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY FOR MENTAL LAYERS
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08644509
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Filing Dt:
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05/10/1996
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY FOR METAL LAYERS AND FILMS
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Patent #:
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Issue Dt:
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07/21/1998
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Application #:
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08718937
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Filing Dt:
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09/24/1996
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Title:
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MULTI-OXIDIZER SLURRY FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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08753482
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Filing Dt:
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11/26/1996
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Title:
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COMPOSITION AND SLURRY USEFUL FOR METAL CMP
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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08763705
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Filing Dt:
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12/09/1996
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08774488
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Filing Dt:
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12/30/1996
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Title:
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COMPOSITION FOR OXIDE CMP
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08800562
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Filing Dt:
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02/18/1997
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Title:
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MULTI-OXIDIZER SLURRY FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08827918
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Filing Dt:
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04/08/1997
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Title:
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COMPOSITION AND SLURRY USEFUL FOR METAL CMP
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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08844195
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Filing Dt:
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04/18/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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08891468
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Filing Dt:
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07/11/1997
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Title:
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COMPOSITION AND SLURRY USEFUL FOR METAL CMP
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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08891649
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Filing Dt:
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07/11/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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07/04/2000
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Application #:
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08901803
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Filing Dt:
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07/28/1997
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Title:
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POLISHING COMPOSITION INCLUDING AN INHIBITOR OF TUNGSTEN ETCHING
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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08944036
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Filing Dt:
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09/29/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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02/10/2004
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Application #:
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08994894
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Filing Dt:
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12/19/1997
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Title:
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COMPOSITION FOR OXIDE CMP
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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08997289
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Filing Dt:
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12/23/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY FOR TUNGSTEN
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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08997290
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Filing Dt:
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12/23/1997
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY AND METHOD FOR POLISHING METAL/-OXIDE LAYERS
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09040630
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Filing Dt:
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03/18/1998
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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09062327
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Filing Dt:
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04/17/1998
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Title:
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POLISHING PAD FOR A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09084630
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Filing Dt:
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05/26/1998
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Title:
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CMP SLURRY CONTAINING A SOLID CATALYST
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09086659
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Filing Dt:
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05/29/1998
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Title:
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POLISHING COMPOSITION INCLUDING AN INHIBITOR OF TUNGSTEN ETCHING
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09105060
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Filing Dt:
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06/26/1998
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY AND METHOD FOR USING SAME
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09105065
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Filing Dt:
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06/26/1998
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATES
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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09105555
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Filing Dt:
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06/26/1998
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATE
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09226191
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Filing Dt:
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01/07/1999
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Title:
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DUAL-VALENT RARE EARTH ADDITIVES TO POLISHING SLURRIES
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09307123
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Filing Dt:
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05/07/1999
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION OF BARRIERS OR LINERS FOR COPPER METALLURGY
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09366588
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Filing Dt:
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08/04/1999
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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CHEMICAL MECHANICAL POLISHING METHOD USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09405249
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Filing Dt:
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09/27/1999
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Title:
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CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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10/14/2003
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Application #:
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09409798
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Filing Dt:
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09/30/1999
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION OF METALLURGY
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09425473
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Filing Dt:
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10/22/1999
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Title:
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COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09428965
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Filing Dt:
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11/04/1999
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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USE OF CSOH IN A DIELECTRIC CMP SLURRY
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09440401
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Filing Dt:
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11/15/1999
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09440525
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Filing Dt:
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11/15/1999
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09472961
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Filing Dt:
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12/28/1999
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Title:
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SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09501221
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Filing Dt:
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02/10/2000
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Title:
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Method for Polishing a Substrate Using a CMP Slurry
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09503996
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Filing Dt:
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02/14/2000
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Title:
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Method of polishing using multi-oxidizer slurry
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09542774
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Filing Dt:
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04/04/2000
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Title:
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METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN AMINO ACID-CONTAINING COMPOSITION
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09562298
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Filing Dt:
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05/01/2000
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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Patent #:
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Issue Dt:
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12/20/2005
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Application #:
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09595227
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Filing Dt:
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06/16/2000
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Title:
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METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH A PHOSPHATE ION-CONTAINING POLISHING SYSTEM
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09609480
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Filing Dt:
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07/05/2000
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Title:
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SILANE CONTAINING POLISHING COMPOSITION FOR CMP
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09609882
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Filing Dt:
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07/05/2000
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Title:
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POLISHING COMPOSITION FOR METAL CMP
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09609884
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Filing Dt:
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07/05/2000
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Title:
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CMP COMPOSITION CONTAINING SILANE MODIFIED ABRASIVE PARTICLES
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09625142
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Filing Dt:
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07/25/2000
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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09636246
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Filing Dt:
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08/10/2000
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Title:
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POLISHING SYSTEM WITH STOPPING COMPOUND AND METHOD OF ITS USE
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09656665
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Filing Dt:
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09/07/2000
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Title:
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METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN OXIDIZED HALIDE-CONTAINING POLISHING SYSTEM
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09660847
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Filing Dt:
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09/13/2000
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Title:
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Chemical mechanical polishing method useful for copper substrates
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09682662
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Filing Dt:
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10/03/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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POLISHING PAD COMPRISING A FILLED TRANSLUCENT REGION
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09690585
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Filing Dt:
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10/17/2000
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Title:
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METHOD OF POLISHING A MEMORY OR RIGID DISK WITH AN AMMONIA- AND/OR HALIDE-CONTAINING COMPOSITION
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09728779
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Filing Dt:
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12/01/2000
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Title:
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Chemical-mechanical polishing method
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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09737905
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Filing Dt:
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12/15/2000
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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METHOD OF POLISHING OR PLANARIZING A SUBSTRATE
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09766750
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Filing Dt:
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01/22/2001
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Publication #:
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Pub Dt:
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11/01/2001
| | | | |
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Title:
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CMP POLISHING PAD INCLUDING A SOLID CATALYST
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09766759
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Filing Dt:
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01/22/2001
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Title:
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CATALYTIC REACTIVE PAD FOR METAL CMP
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09788082
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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POLISHING DISK WITH END-POINT DETECTION PORT
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09800009
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Filing Dt:
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03/06/2001
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Publication #:
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Pub Dt:
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11/15/2001
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATES
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09961934
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Filing Dt:
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09/24/2001
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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RARE EARTH SALT/OXIDIZER-BASED CMP METHOD
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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09975335
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Filing Dt:
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10/11/2001
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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PHOSPHONO COMPOUND-CONTAINING POLISHING COMPOSITION AND METHOD OF USING SAME
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09995025
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Filing Dt:
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11/27/2001
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Publication #:
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Pub Dt:
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05/29/2003
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Title:
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POLISHING PAD COMPRISING PARTICLES WITH A SOLID CORE AND POLYMERIC SHELL
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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10022308
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12/18/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10022317
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Filing Dt:
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12/18/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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10033152
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Filing Dt:
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10/24/2001
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Publication #:
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Pub Dt:
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04/24/2003
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Title:
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BORON-CONTAINING POLISHING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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10044174
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Filing Dt:
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01/11/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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ALKALI METAL-CONTAINING POLISHING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10051241
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Filing Dt:
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01/18/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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CMP SYSTEMS AND METHODS UTILIZING AMINE-CONTAINING POLYMERS
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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10054059
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Filing Dt:
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01/22/2002
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Title:
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CMP METHOD FOR NOBLE METALS
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10073844
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Filing Dt:
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02/11/2002
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Title:
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ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP
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Patent #:
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01/11/2005
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Application #:
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10083985
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02/27/2002
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Publication #:
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Pub Dt:
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09/05/2002
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Title:
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METHOD FOR MANUFACTURING A POLISHING PAD HAVING A COMPRESSED TRANSLUCENT REGION
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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10092406
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03/05/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Title:
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METHANOL-CONTAINING SILICA-BASED CMP COMPOSITIONS
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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10099492
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Filing Dt:
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03/15/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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02/08/2005
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Application #:
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10117554
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Filing Dt:
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04/04/2002
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Publication #:
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Pub Dt:
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10/09/2003
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Title:
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PROCESS FOR FABRICATING OPTICAL SWITCHES
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10119862
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Filing Dt:
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04/10/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD OF REDUCING IN-TRENCH SMEARING DURING POLISHING
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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10142681
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Filing Dt:
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05/10/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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COMPOSITIONS AND METHODS FOR DIELECTRIC CMP
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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10145357
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Filing Dt:
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05/14/2002
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Publication #:
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Pub Dt:
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11/14/2002
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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10154231
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Filing Dt:
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05/23/2002
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Publication #:
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Pub Dt:
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11/14/2002
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Title:
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CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10164916
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Filing Dt:
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06/06/2002
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Publication #:
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Pub Dt:
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12/11/2003
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Title:
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METAL OXIDE COATED CARBON BLACK FOR CMP
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Patent #:
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Issue Dt:
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12/13/2005
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Application #:
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10165100
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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12/11/2003
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Title:
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CMP COMPOSITIONS FOR LOW-K DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10165133
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Filing Dt:
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06/06/2002
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Title:
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CMP COMPOSITIONS CONTAINING IODINE AND AN IODINE VAPOR-TRAPPING AGENT
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Patent #:
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Issue Dt:
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08/02/2005
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Application #:
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10190360
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Filing Dt:
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07/03/2002
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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METHOD AND APPARATUS FOR PROVIDING A MINIATURE, FLEXIBLE VOLTAGE UPCONVERTER
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10193589
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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08/14/2003
| | | | |
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Title:
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GLOBAL PLANARIZATION METHOD
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10198841
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Filing Dt:
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07/19/2002
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Publication #:
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Pub Dt:
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01/22/2004
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Title:
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METHOD OF POLISHING A SUBSTRATE WITH A POLISHING SYSTEM CONTAINING CONDUCTING POLYMER
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10199704
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Filing Dt:
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07/19/2002
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Publication #:
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Pub Dt:
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01/22/2004
| | | | |
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Title:
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POLISHING COMPOSITION CONTAINING CONDUCTING POLYMER
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10231047
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Filing Dt:
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08/30/2002
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Publication #:
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Pub Dt:
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04/17/2003
| | | | |
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Title:
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SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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10246280
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Filing Dt:
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09/18/2002
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Publication #:
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Pub Dt:
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07/03/2003
| | | | |
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Title:
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METHOD FOR COPPER CMP USING POLYMERIC COMPLEXING AGENTS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10269864
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Filing Dt:
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10/11/2002
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Publication #:
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Pub Dt:
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12/11/2003
| | | | |
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Title:
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CMP METHOD UTILIZING AMPHIPHILIC NONIONIC SURFACTANTS
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10281782
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Filing Dt:
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10/28/2002
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Publication #:
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Pub Dt:
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11/27/2003
| | | | |
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Title:
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MICROPOROUS POLISHING PADS
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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10282489
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Filing Dt:
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10/28/2002
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Publication #:
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Pub Dt:
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04/29/2004
| | | | |
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Title:
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TRANSPARENT MICROPOROUS MATERIALS FOR CMP
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10295836
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Filing Dt:
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11/18/2002
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Title:
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POLISHING COMPOSITIONS AND USE THEREOF
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10300196
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Filing Dt:
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11/20/2002
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Publication #:
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Pub Dt:
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05/20/2004
| | | | |
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Title:
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POLISHING COMPOSITION STORAGE CONTAINER
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10324634
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Filing Dt:
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12/19/2002
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Publication #:
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Pub Dt:
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09/04/2003
| | | | |
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Title:
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CHEMICAL MECHANICAL POLISHING SYSTEMS AND METHODS FOR THEIR USE
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10353512
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Filing Dt:
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01/29/2003
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Publication #:
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Pub Dt:
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08/14/2003
| | | | |
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Title:
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METHOD OF POLISHING A MULTI-LAYER SUBSTRATE
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Patent #:
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Issue Dt:
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02/08/2005
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Application #:
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10353542
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Filing Dt:
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01/29/2003
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Publication #:
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Pub Dt:
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09/11/2003
| | | | |
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Title:
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METHOD OF USING A POLISHING SYSTEM
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10356970
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Filing Dt:
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02/03/2003
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Publication #:
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Pub Dt:
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08/05/2004
| | | | |
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Title:
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METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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10361520
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
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Title:
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CMP PAD WITH COMPOSITE TRANSPARENT WINDOW
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Patent #:
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Issue Dt:
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12/21/2004
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Application #:
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10361720
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
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Title:
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CMP PAD WITH COMPOSITE TRANSPARENT WINDOW
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10364243
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Filing Dt:
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02/11/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
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Title:
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MIXED-ABRASIVE POLISHING COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10368275
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Filing Dt:
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02/18/2003
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Title:
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CATALYST/OXIDIZER-BASED CMP SYSTEM FOR ORGANIC POLYMER FILMS
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10376172
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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09/25/2003
| | | | |
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Title:
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CMP METHOD FOR NOBLE METALS
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10382370
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Filing Dt:
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03/06/2003
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Publication #:
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Pub Dt:
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09/09/2004
| | | | |
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Title:
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METHOD OF POLISHING A LANTHANIDE SUBSTRATE
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10419580
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/21/2004
| | | | |
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Title:
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COATED METAL OXIDE PARTICLES FOR CMP
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10419659
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
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Title:
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POLISHING COMPOSITION FOR METAL CMP
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Patent #:
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Issue Dt:
|
04/26/2005
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Application #:
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10463680
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
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Title:
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
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Patent #:
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Issue Dt:
|
02/14/2006
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Application #:
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10463721
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
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Title:
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ULTRASONIC WELDING METHOD FOR THE MANUFACTURE OF A POLISHING PAD COMPRISING AN OPTICALLY TRANSMISSIVE REGION
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