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Reel/Frame:027860/0924   Pages: 4
Recorded: 03/14/2012
Attorney Dkt #:MAPS-49193
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/12/2016
Application #:
13391310
Filing Dt:
03/14/2012
Publication #:
Pub Dt:
06/28/2012
Title:
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignors
1
Exec Dt:
02/23/2012
2
Exec Dt:
02/24/2012
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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