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Reel/Frame:028053/0737   Pages: 3
Recorded: 04/16/2012
Attorney Dkt #:LAM1P324/P2323
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/08/2014
Application #:
13369125
Filing Dt:
02/08/2012
Publication #:
Pub Dt:
08/08/2013
Title:
CONTROLLED GAS MIXING FOR SMOOTH SIDEWALL RAPID ALTERNATING ETCH PROCESS
Assignors
1
Exec Dt:
02/07/2012
2
Exec Dt:
02/07/2012
3
Exec Dt:
02/22/2012
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
BEYER LAW GROUP LLP
P.O. BOX 1687
CUPERTINO, CA 95015-1687

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