Patent Assignment Details
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| Reel/Frame: | 028114/0931 | |
| Pages: | 10 |
| | Recorded: | 04/26/2012 | | |
| Attorney Dkt #: | A14383/T95310 (787011) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13072546
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Filing Dt:
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03/25/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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WAFER PROFILE MODIFICATION THROUGH HOT/COLD TEMPERATURE ZONES ON PEDESTAL FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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WILLIAM L. SHAFFER
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KILPATRICK TOWNSEND & STOCKTON LLP
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111
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