Patent Assignment Details
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| Reel/Frame: | 028303/0049 | |
| Pages: | 5 |
| | Recorded: | 06/01/2012 | | |
| Attorney Dkt #: | P5856US00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13486262
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Filing Dt:
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06/01/2012
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Publication #:
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Pub Dt:
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12/05/2013
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Title:
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CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MARK DESIGN
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Assignee
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| 60 WOODLANDS INDUSTRIAL PARK D |
| STREET 2 |
| SINGAPORE, SINGAPORE 738406 |
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Correspondence name and address
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DITTHAVONG MORI & STEINER, P.C.
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918 PRINCE STREET
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ALEXANDRIA, VA 22314
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